Extractors sidewinder

Extractors sidewinder is a frequently changed consumables part which wear out in the course of FIB operation.

Focused Ion Beam (FIB) is widely used for Transmission Electron Microscopy (TEM) sample preparation. Ions from the LMIS remove material by sputtering in nanometers precisely. Other applications for FIB include modifications of integrated circuits, ion beam lithography, failure analysis, and micro-electro-mechanical systems (MEMS) fabrication.

The source of ions comes from LMIS. LMIS comprised a variety of elements, both conductive and non-conductive, such as Fe, Co, Ni, Ge, Au, Si, Ga, etc. The majority of the FIB in the market use Ga as their ion source. Ga is a popular metal due to its properties of low melting temperature and low volatility. A Taylor Cone – formed at the LMIS needle tip when there is an electric potential at the extractor. The ion beam will pass through the suppressor and the extractor once the voltage potential goes beyond the threshold.

Some of the important parts which involved focusing and steering beam include the suppressor, extractors sidewinder, and aperture strip. See Figure 1.

Extractors sidewinder

Figure 1. FIB column

The aperture strip defines the probe size and its currents through a series of micro-machined holes which ranged from 8um. See Figure 2

Extractors sidewinder, aperture

Figure 2. Customised Aperture Strip

Dual Beam FIB

FIB can incorporate the imaging function of a (SEM) to allow the operator to visualize the sputtering in action. It reduces the time required to remove the specimen over to SEM and vice versa.  Another key point function of SEM is that it enables the system to deposit material and to etch material. The secondary electron beam is able to assist a Chemical Vapor Deposition (CVD) process to deposit material with precision as good as FIB. Commonly the Pt Source is used as the injection gas. The Pt source is mildly heated over its melting temperature in the crucible into a vapor state before injecting into the chamber. Platinum deposits can perform as a protection film as well as a temporary bonding agent in lift-off TEM sample preparation. See Figure 3.

Extractors sidewinder, aperture

Figure 3. TEM Lift-off

XTI Services is able to supply FIB consumables parts such as Pt source, extractor, and suppressor. Overhaul emitter, FEI sidewinder column and parts repair.

Extractors sidewinder

Extractors sidewinder

Fully compatible, replacement extractors for sidewinder and tomahawk column. Manufactured and  Introduced back in 2014. These are stable and matured parts where users are using at ease.

FIB/TEM services are available from Wintech Nano Pte Ltd