CMP retaining rings Singapore for both AMAT and EBARA CMP tools. Supply from factory which is the very first 2nd source for TSMC. More that 30 years of experience since 1990s. One of the best manufacturer for retaining rings. Collaboration with customer to customised CMP retaining rings’ design, material and break-in to produce best possible efficient parts.
Various spares and consumables parts for CMP Ebara 300mm tools. REX-300S, REX-300S2, REX-300X. We would be glad to answer your requirement for CMP retaining/AEP rings from Ebara or Applied Materials.
A CMP retaining ring is a component used in the chemical mechanical polishing (CMP) process, which is a critical step in the semiconductor fabrication process. It secures the wafer while controlling the rate and quality of the polish. It is important to match the right retainer ring material to the chemical slurry used and level of polish required. Ensinger, one of the leading suppliers of high-performance plastic materials for CMP retaining rings, has cooperated with an outside independent laboratory to evaluate the impact of different CMP ring materials on CMP performance. A technical article was published in the Electrochemical Society Journal of Solid State Science and Technology titled “Tribological, Thermal, Kinetic, and Pad Micro-Textural Studies Using Polyphenylene Sulfide CMP Retaining Rings in Interlayer Dielectric Chemical Mechanical Planarization.”
Supplying both 200mm and 300mm CMP retaining rings. Common material from PPS, PEEK to harden polymer with carbon. Proven and used by majors foundries including TSMC, UMC and Globalfoundries. Consistent quality and production leadtime to meet any high volume requirement.